Download e-book for iPad: A guide to hands-on MEMS design and prototyping by Joel A. Kubby

By Joel A. Kubby

ISBN-10: 0511984669

ISBN-13: 9780511984662

ISBN-10: 1139109898

ISBN-13: 9781139109895

ISBN-10: 1139114255

ISBN-13: 9781139114257

ISBN-10: 113912708X

ISBN-13: 9781139127080

No matter if you're a scholar taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this functional advisor offers the hands-on event had to layout, fabricate and try out MEMS units. you are going to methods to use foundry multi-project fabrication tactics for inexpensive MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, besides and workouts and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online
''Whether you're a pupil taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this useful consultant presents the hands-on event had to layout, fabricate and try MEMS units. you are going to the right way to use foundry multi-project fabrication approaches for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition and routines and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with strategies to the layout problem difficulties and a range of case reports of MEMS devices''--  Read more... laptop generated contents be aware: 1. creation; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and try; eight. From prototype to product: MEMS deformable mirrors for adaptive optics

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Fearing, Microfabricated hinges, Sensor and Actuators A 33(3), pp. 249–256 (1992). A. Aksyuk, F. J. Bishop, Stress-induced curvature engineering in surface micromachined devices, SPIE 3680, pp. 984–993 (1999). T. S. T. Howe, Supercritical carbon dioxide drying of microstructures, Proc. Transducers ’93 (Yokohama), pp. 296–299 (1993). J. M. Sarro, Surface versus bulk micromachining: The contest for suitable applications, J. Micromechanical Microengineering 8, pp. 45–53 (1998). J. M. G. R. W. E. W.

This layer can be used to form resistor elements or mechanical structures, or for electrical crossover routing. 17(f). 17[h]) with the fourth mask level, METANCH, and is then wet chemically etched. The Oxide2 patterning step also provides the pattern for the metal structure anchors. 17[h]). 17). The plating base layer provides electrical continuity across the wafer for the subsequent metal electroplating step. 17(i). 17 Cross sections through the MetalMUMPS process. ) See color plate section. 5 mm gold layer that forms a pad material suitable for wire bonding (not shown).

22 (right). For the PolyMUMPS process, the layers include Poly0, Anchor1, Dimple, Poly1, Poly1-Poly2 Via, Anchor2, Poly2, and Metal. In addition, holes through each of the poly layers can be defined using Hole0, Hole1, Hole2, and through the metal layer using HoleMetal. These holes aid in defining etch release holes in each of the structural layers. Layers can be added, deleted, copied, renamed, or rearranged. The layer properties can be modified (thickness, stress, resistivity), and the new layers can be derived from existing layers using Boolean operations to merge, substract, grow, and shrink.

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A guide to hands-on MEMS design and prototyping by Joel A. Kubby


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